The tool allows for rapid measurement of RMS roughness on both transparent and non-
transparent surfaces in the range from 0.1-2.5um. SOLLC is accepting customer samples for tool
evaluation purposes.
Advantages:
One can see it in the privacy of his/her office!
You may "try it at home". Just look at the surface of your table at a very oblique angle - it will appear tobe "mirror like", while when looked at from the top it behaves as rough diffused surface.
Mode of Operation:
Smooth Surface (upper panel)
Rough Surface (lower panel)
For more information contact us at info@zebraoptical.com
transparent surfaces in the range from 0.1-2.5um. SOLLC is accepting customer samples for tool
evaluation purposes.
Advantages:
 | 0.25s/point acquisition time (spot size ~ 1mm) | |
| Immunity to vibration and stray light if modulation scheme is employed | |
| Excellent value | |
| Straightforward integration into the production line |
One can see it in the privacy of his/her office!
You may "try it at home". Just look at the surface of your table at a very oblique angle - it will appear to
Mode of Operation:
Smooth Surface (upper panel)
| Optical path difference (OPD) between dashed | |
| and solid ray is zero |
Rough Surface (lower panel)
| Some light is scattered by the rough features | |
| Sample scatters light in diffuse manner |
For more information contact us at info@zebraoptical.com
ZebraOptical Optoprofiler
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Roughness via Scatterometry
Principle of Operation
Principle of Operation: Practicality
| The system operates on the ideal that even rough surfaces tend to reflect light well when | |
| viewed at oblique angles. |
Principle of Operation: Practicality
| Low incidence angle: The rough wafer appears matte (Paper-like white surface) | |
| High incidence angle: The same rough wafer acts as a reflective surface | |