ZebraOptical Optoprofiler
Roughness via Scatterometry
The tool allows for rapid measurement of RMS roughness on both transparent
customer samples for tool evaluation purposes.
Excellent value
Straightforward integration into the production line

Principle of Operation
The system operates on the ideal that even rough surfaces tend to reflect
light well when viewed at oblique angles.

Principle of Operation: Practicality
Low incidence angle: The rough wafer appears matte (Paper-like white
surface)
High incidence angle: The same rough wafer acts as a reflective surface

One can see it in the privacy of his/her office!
You may "try it at home". Just look at the surface of your table at a very oblique angle - it will appear to be "mirror like", while when looked at from the top it behaves as
rough diffused surface.

Mode of Operation:

Smooth Surface (upper panel)
Optical path difference (OPD) between dashed and solid ray is zero

Rough Surface (lower panel)
Some light is scattered by the rough features
Sample scatters light in diffuse manner

For more information contact us at info@zebraoptical.com