The tool allows for rapid measurement of RMS roughness on both transparent and non-
transparent surfaces in the range from 0.1-2.5um. SOLLC is accepting customer samples for tool
evaluation purposes.

0.25s/point acquisition time (spot size ~ 1mm)
Immunity to vibration and stray light if modulation scheme is employed
Excellent value
Straightforward integration into the production line

One can see it in the privacy of his/her office!
You may "try it at home". Just look at the surface of your table at a very oblique angle - it will appear to be "mirror like", while when looked at from the top it behaves as rough diffused surface.

Mode of Operation:

Smooth Surface (upper panel)
Optical path difference (OPD) between dashed
and solid ray is zero

Rough Surface (lower panel)
Some light is scattered by the rough features
Sample scatters light in diffuse manner

For more information contact us at
ZebraOptical Optoprofiler
Roughness via Scatterometry
Principle of Operation
The system operates on the ideal that even rough surfaces tend to reflect light well when
viewed at oblique angles.

Principle of Operation: Practicality
Low incidence angle: The rough wafer appears matte (Paper-like white surface)
High incidence angle: The same rough wafer acts as a reflective surface