Dimensional and Stress Metrology for Bow and Warp measurements
on crystalline, thin film materials, and minipanels.
New metrology for X-ray mirrors (Video demo).
Quantum Efficiency (QE) Uniformity measurements, using white light
and color scanner technology.
Glass Bow, Roller Wave, full Glass substrate scalable metrology (0.5
m x 1 m, 2 m x 2 m, and larger glass.
Interferometric Probe a Non Contact Wafer Thickness and Wafer Topo- and Tomography
Low Coherence Metrology for:
For Measurement videos on selected models please click here.
|Wafer thickness measurement|
|Trench depth measurement|
|Membrane thickness measurement|
|Laser and LED application|
|MEMs tomography applications|